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Special Interest Group Meeting: Micro/Nano Manufacturing. November 27-28, 2019. Technische Universit├Ąt Berlin (Germany) 
Micro- and nano-scale manufacturing has been the subject of research and industrial focus over the past 20 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies.


MNE2023. September 25-28, 2023. Berlin (Germany) 
NEMS & MEMS, NanoFabrication, NanoLithography

MNE2022. September 19-23, 2022. Leuven (Belgium) 
NEMS & MEMS, NanoFabrication, NanoLithography

Nanometrology 2020 International Conference, 24 - 26 June 2020, Paris (France) 
NanoMetrology & Standards

NanoScale2019. October 15-16, 2019. Braunschweig (Germany) 
NanoMetrology & Standards

International Congress on Analytical Nanoscience and Nanotechnology - IX NyNA 2019. July 2-4, 2019. Zaragoza (Spain) 
NanoMaterials, NanoMetrology & Standards, NanoSensors & NanoDevices

 
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