Conferences & Courses Related Events Special Interest Group Meeting: Micro/Nano Manufacturing. November 27-28, 2019. Technische Universität Berlin (Germany)  Micro- and nano-scale manufacturing has been the subject of research and industrial focus over the past 20 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. MNE 2024. September 16-19, 2024. Montpellier, France  NanoFabrication MNE2023. September 25-28, 2023. Berlin (Germany)  NEMS & MEMS, NanoFabrication, NanoLithography MNE2022. September 19-23, 2022. Leuven (Belgium)  NEMS & MEMS, NanoFabrication, NanoLithography Nanometrology 2020 International Conference, 24 - 26 June 2020, Paris (France)  NanoMetrology & Standards NanoScale2019. October 15-16, 2019. Braunschweig (Germany)  NanoMetrology & Standards