Grupo de Nanofabricacion y Propiedades Funcionales de Nanoestructuras
Instituto de Microelectrónica de Barcelona. Consejo Superior de Investigaciones Científicas
General information
- Department
- Micro y Nano Sistemas, Instituto de Microelectrónica de Barcelona.
- Acronym
- CSIC
- Address
- Campus de la Universidad Autonoma de Barcelona
- Postal Code
- 08193-Bellaterra
- City
- Contact
- Perez-Murano, Francesc
- Position
- Francesc.Perez@csic.es
- Alt. email
- Website
- nanonems.imb-cnm.csic.es
Organization profile
- Year Established
- Employees
- ORCID
- ResearchGate
- Google Scholar
Main research areas
Nanofabrication, Nanotubes, SPM
Main research and technological activities
Patents and technology transfer
- Active Patents
- Patents Filed During Last 5 Years
- Licensing Agreements
- Spin-offs Created
Services offered
Available instruments and equipment
| Equipment Name | Model | Manufacturer | Year | Open Access |
|---|---|---|---|---|
| Atomic Force Microscopy (ICON-Nanoscope V) | No | |||
| Nanolithography equipment (Electron beam lithography, Focused ion beam, Nanoimprint lithography, Self-assembly) | No | |||
| Photolithography equipment (Optical aligners, i-line optical stepper, direct write laser) | No | |||
| Deposition, growth and etching equipments, including CVD growth, sputtering, RIE, ion implantation, etc) | No |
Other relevant information
Acceso a la Sala Blanca del Centro Nacional de Microelectrónica